Product Features

• Single-Stage Configuration

• Metal-to-Metal diaphragm to body seal & dual layer sealing ring

• Integrated waste gas disposal connection for additional safety

• Body Port Size: 1/4” FSR(F)

Applications

• Semiconductor Industry

• Solar Energy Industry

• Vacuum Plating Equipment

• Spec Gas Equipment

Specifications

• Maximum inlet pressure: 3000 psig

• Maximum outlet pressure: 500 psig

• Safety test pressure: 1.5 x Maximum inlet pressure

• Temperature range: -40?F~165?F (-40?C~ 74?C)

• Inboard leakage: 2 x 10^-8 atm.cc/sec He

• Outboard leakage: 2 x 10^-8 atm.cc/sec He inlet pressure: 1500 psig

• Maximum Cv: 0.16

• Weight: 3.42 lb

Materials

• Body: 316L (EP) - Stainless Steel, Hastelloy®

• Bonnet: 316L Stainless Steel 

• Seat: PCTFE 

• Valve Stem: C22 Hastelloy® 

• Diaphragm: C22 Hastelloy®

Dimensions

Flow Data

Body Ports

Ordering Information